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Mikasa
model 1H-D7
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| Compact and Cost Performance Spinner (spin coater) with Multi Function
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Features
- The first programmable multi function spinner in this class
- Convenient Programmable positioning for polygon substrates
- Applicable up to Φ101.6mm(4inch) substrates
- RPM 300~8000
- vacuum
switch
Size: 260Wx330Dx230H
(mm) |
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Mikasa
model 1H-DX2
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| The Best Selling Spinner (spincoater) with Simple Program |
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Features
- Programmable multi function spinner
- Convenient Programmable positioning for polygon substrates
- Applicable up to Φ152.4mm (6 inch) substrates
- RPM 300~7000
- vacuum
switch
Size: 350Wx530Dx270H
(mm) |
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Mikasa
model 1H-306S
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| Applicable to Φ203.2mm (8 inch) substrates, The Best Selling
Spinner (spin coater) with Simple Program - |
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Features
- Programmable multi function spinner
- Convenient Programmable positioning for polygon substrates
- Applicable up to Φ203.2mm (8 inch) substrates
Size: 510Wx610Dx330H
(mm) |
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Mikasa
model 1H-306S + dispenser
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Photoresist용
디스펜서 부착 모델
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Mikasa
model 1H-700C
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1H-700C; Spin Coater Applicable to Φ304.8mm (12 inch)
substrates
Features
- Applicable Coating to the large-sized substrates up to Φ304.8mm (12
inch)
(Applicable to substrates with various sizes and forms by chuck
exchange)
- High precision of rotation: Setting frequency ±1rpm
- Convenient Programmable positioning for polygon substrates
- Programmable up to 100-step of rotation
- Two movable arms for photo-resist feeding can be installed
Feeding
position is programmable
- Teflon coated chamber
(SUS is used for the body) Size:
800Wx950Dx1,150W (mm) |
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각종 Mikasa
진공척 제작
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최대 시료 사이즈: 직경
10 ~300mm
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