| Spin coating is a procedure used to apply uniform thin films to flat substrates. In short, an excess amount of
a solution is placed on the
substrate, which is then rotated at high speed in order to spread the fluid by
centrifugal
force.
Rotation is continued while the fluid spins off the edges of the substrate,
until the desired thickness of the film is achieved. The applied solvent is
usually volatile, and simultaneously evaporates. So, the higher the angular
speed of spinning, the thinner the film. The thickness of the film also
depends on the concentration of the solution and the
solvent.
Spin coating is widely used in microfabrication, where it can be used to
create thin films with thicknesses below 10 nm. It is used intensively in photolithography, to
deposit layers of photoresist
about 1~10 micrometre thick.
Photoresist is typically spun at 20 to 80 revolutions per second for 30 to 60
seconds.
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