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* Dicing saw
assembly; 15,000 RPM, diamond sintered saw
blade
* X-axis Section
Drive Method Linear motion slide and
precision manual stage
Readable resolution 10um/ 0.5um(¹Ìµ¿) Stroke
100mm, 150mm Max Digital display for
X-location
* Y-axis Section
Drive Method Step Motor Max
Programmable Stroke 150mm Dicing speed
programmable upto 3mm/sec Max
* Z-axis
Section
Moved by precision manual stage Max Stroke
±5mm Readable resolution
10um
* ¥È -axis
Section
Moved by precision manual stage Rotation Angle (end to end)
360¢ª/ ±15¢ª Readable resolution
1¢ª
Dimension 500W x500L x 450H
Optional
stereo zoom microscope: binocular, 10~45X
Maker : |