Lab film coater

UV Exposure

Developer

Etcher

Dryer

Manual wafer dicing saw

Cleaner

Test & measure

spin coater

UV 노광장치

Helios-6

Spin developer

JS2P-200

Spin etcher

JS2P-200

Spin dryer

4"~6" wafer

UV cleaner

Four point probe

표면저항측정장치

Dip coater

UV 노광장치

Helios-12

JSD-200

SU-30

Vacuum tweezer

Probe station

Roll coater

UV 노광장치

OS-1K

JSD-150

SU-60

Spin cleaner

JS2P-200

Solar cell tester

(Solar simulator)

JS3-155

Spray coater

UV 노광장치

OS-3K

Dry etcher

WTX600

Laminator

UV 노광장치

OS-6K

JSE-200

LPCVD

Low pressure chemical deposition

마스크얼라이너

Mask aligner

평행광 자외선

노광원

UV light source

자외선 경화기

UV curing system