High performance, low cost, and compact desktop type Substrate size; Φ25.4mm(1inch) to Φ152.4mm(6inch) In consideration of chemical resistance, polyvinyl chloride is used for parts moistened with chemical liquid. Continual processing with etching, rinsing, and drying Built-in chemical-liquid-compression-pump (Unnecessary to prepare a pressure tank) Simple, programmable LCD control panel Size: 550Wx400Dx440H(mm)/ 740H